Abstract:
In this thesis, the concept and the realization of laboratory-based optical coherence tomography in the extreme ultraviolet (XUV) spectral range is presented. XUV coherence tomography (XCT) is a three-dimensional imaging technique with an axial resolution down to a few nanometer. A theoretical XCT model has been developed for the reconstruction of the sample structure, which includes the interaction between the XUV light and the sample. It is valid for absorbing samples illuminated under arbitrary angles of incidence and thus extends a common model of optical coherence tomography (OCT). As the information about the absorption and dispersion of the sample is contained in the XCT model, an additional reconstruction of material properties of the sample will be enabled. The demonstration of laboratory-based XCT, which before has only been implemented at synchrotron facilities, was a major gaol of this thesis. Using high harmonic generation (HHG) of a femtosecond infrared laser pulse, a broadband laboratory-based XUV source with sufficient photon flux (approximately 0,2 nW/eV over the full bandwidth) in the so-called silicon transmission window between 30 eV − 100 eV was realized. A revised XCT microscope has been designed, constructed and adapted to the new laser-based XUV source, which routinely facilitates XCT measurements in the laboratory. The microscope is a three meter long vacuum beamline consisting of XUV source, focusing mirror, and sample chamber. A comparison between laser-based and synchrotron-based measurements shows good agreement. With laser-based XCT, an axial resolution of approximately 30 nm has been achieved. This is comparable to the achieved synchrotron-based axial resolution of approximately 20 nm. Accordingly, the axial resolution of XCT is 2-3 orders of magnitude higher than in conventional OCT. Unlike conventional OCT, the realized XCT setup does not use a beamsplitter for the generation of a reference wave. Instead, the surface of the sample serves as a reference. Therefore, the interferometric stability is intrinsically achieved and simplifies the experimental setup significantly. However, such a setup has the disadvantage that the reconstruction is ambiguous, since autocorrelation artifacts appear. A non-ambiguous reconstruction of the axial structure was so far not possible. In this thesis, a novel one-dimensional phase-retrieval algorithm is presented, which is able to remove the artifacts from the signal and allows a non-ambiguous reconstruction of the structure. Three-dimensional structured silicon-based samples have been investigated and processed with the new algorithm, which is referred to as PR-XCT. With the removal of artifacts and thus the possibility to use XCT on samples, whose inner structure is unknown before the measurement, a further goal of this thesis was achieved. In fact, during laser-based PR-XCT measurements, an unexpected nanometer-thin layer was found inside the sample, which was not intentionally planned in the production process. The existence of this layer and thus the XCT measurement could only be confirmed by a transmission electron microscope. To this end, a thin slice was cut out of the sample, which was thus destroyed. The resolution of a scanning electron microscope was not high enough to resolve the layer. Later it turned out, that the vacuum chamber was vented for a short amount of time during the production process and a 1-2 nm layer of SiO2 was formed. Hereby, a striking advantage of XUV microscopy becomes apparent. Lighter elements like oxygen produce a high contrast in the XUV albeit they are almost indistinguishable from surrounding light elements like silicon in an electron microscope. In this work, XCT is realized using optics with low numerical aperture (NA) since the fabrication of high NA optics in the XUV is technically extremely demanding. Therefore, the lateral resolution of the laboratory-based XCT setup is limited to approximately 23 μm. At least, the lateral resolution has been improved by a factor of 10 compared to the synchrotron-based measurements. However, the axial resolution of XCT is still orders of magnitudes better than the lateral resolution. Even with this technical limitation of the current XCT setup, several applications are within reach, e.g., threedimensional investigation of (multilayer-)coatings of optical mirrors or even XUV-mirrors, axial structured devices like solar cells or axial-structured semiconductor devices like graphene-based electronics. In addition, imaging of laterally homogeneous biological membranes might be possible. XCT with high numerical aperture and thus high lateral resolution could even have further applications, e.g., non-destructive three-dimensional imaging of semiconductor devices, lithographic masks, and biological structures. A combination of XCT with lensless imaging techniques like „Coherent Diffraction Imaging“ or Ptychography might be a promising approach to improve the lateral resolution of XCT. Furthermore, the intrinsic time resolution of the HHG source in the range of femto- or even attoseconds may allow time-resolved imaging of ultrafast processes in solids.