Mengqi Du,
Xiaomeng Liu,
Antonios Pelekanidis,
Fengling Zhang,
Lars Lötgering,
Patrick Konold,
Christina L. Porter,
Peter Smorenburg,
Kjeld S. E. Eikema,
and Stefan Witte
High-resolution wavefront sensing and aberration analysis of multi-spectral extreme ultraviolet beams
Optica, 10 (2) :255 ( 2023)
Publisher: OSA
ISSN: 2334-2536
High-resolution wavefront sensing and aberration analysis of multi-spectral extreme ultraviolet beams
Optica, 10 (2) :255 ( 2023)
Publisher: OSA
ISSN: 2334-2536